Open Access Open Access  Restricted Access Subscription or Fee Access

Nanolithography: A Promising Tool for Precision Nanofabrication

Riya Totlani

Abstract


Nanolithography is a crucial technique in nanofabrication that involves patterning materials on a manometer scale. With the increasing demand for smaller, faster, and more efficient electronic devices, nanolithography has become an indispensable tool in the semiconductor industry, where it is used to create structures for integrated circuits, sensors, and other nanoelectronic components. The two main types of nanolithography are top-down and bottom-up approaches. In top-down lithography, a bulk material is patterned by removing unwanted areas using techniques such as electron beam lithography or photolithography. On the other hand, bottom-up lithography involves building up a material layer by layer, using techniques such as molecular self-assembly or dip-pen lithography. One of the significant advantages of nanolithography is its ability to create precise and complex patterns with high resolution and accuracy. With advancements in technology, the resolution of nanolithography has improved significantly, enabling the production of features as small as a few nanometers in size. Nanolithography has applications beyond the semiconductor industry, including in biotechnology, where it is used to create nanostructures for drug delivery and tissue engineering. It also has potential applications in nanophotonics, where it is used to create structures for optical devices and sensors. However, despite its many advantages, nanolithography faces several challenges, such as cost, scalability, and complexity. One of the significant challenges is the limited throughput of top-down lithography techniques, which makes them unsuitable for mass production. Moreover, bottom-up lithography techniques are limited by the availability of suitable materials for building up the layers.


Full Text:

PDF

References


Lin, Q., Zhou, W., & Huang, J. (2019). Electron beam lithography: a review of current techniques and future prospects. Nanoscale Research Letters, 14(1), 1-14.

Schift, H. (2018). Nanoimprint lithography: An old story in modern times? A review. Journal of Vacuum Science & Technology B, 36(2), 020801.

Madou, M. J. (2002). Fundamentals of microfabrication (Vol. 2). CRC press.

Hwang, S. W., Lee, H. J., & Cho, Y. H. (2021). Emerging applications of nanoimprint lithography. Nanomaterials, 11(4), 1025.

Cheng, Y., Luo, G., Zhu, L., & Xie, X. (2016). A comprehensive review of micro/nanofabrication technologies for microfluidic devices. Sensors and Actuators B: Chemical, 222, 389-404.

Vazquez-Mena, O., & Solis-Tinoco, V. (2017). Recent advances in nanolithography techniques: challenges and opportunities. Journal of Materials Science & Technology, 33(12), 1421-1430.

Yan, J., Liu, Z., Zhang, L., & Yu, X. F. (2017). Recent advances and future prospects of nanoimprint lithography. Frontiers of Optoelectronics, 10(4), 369-379.

Guo, L. J. (2004). Nanoimprint lithography: methods and material requirements. Advanced Materials, 16(3), 244-251.

Satyanarayana, S., & Basu, B. (2015). Dip-pen nanolithography: a versatile technique for patterning of functional materials. Bulletin of Materials Science, 38(3), 639-651.

Lim, J. H., & Kim, J. (2016). Recent advances in nanopatterning techniques for biomedical applications. Journal of Materials Chemistry B, 4(31), 5168-5183.

Chen, X., Shen, Y., & Li, X. (2020). Emerging applications of nanolithography in nanoelectronics. Nanotechnology, 31(38), 382002.

Liu, J., Wu, M., & Chen, C. (2020). Recent advances in photolithography for micro/nanofabrication. Materials Today Physics, 13, 100175.

Kato, K., Fujita, K., & Asakawa, K. (2017). Ion beam lithography: a review. Microelectronic Engineering, 170, 1-12.

Jang, H. J., & Lee, J. H. (2020). Fabrication of metal and graphene nanostructures using ion beam lithography. Nanomaterials, 10(5), 912.

Thiel, B. L. (2018). Introduction to microfabrication. Oxford University Press.

Shafiei, F., & Yeow, J. T. (2015). Dip-pen nanolithography: a versatile technique for patterning biomolecules. Biosensors and Bioelectronics, 74, 113-130.

Hsu, J. W. P., Lee, H., & Yoon, D. S. (2018). Review of recent developments in dip pen nanolithography. Micromachines, 9(10), 487.

Fan, Z., Wang, X., Zhang, L., & Fang, N. (2017). Recent advances in nanolithography based on tip-based nanomanipulation. Journal of Micromechanics and Microengineering, 27(6), 063001.

Bensalem, S., & Tabti, S. (2017). Theoretical and practical aspects of nanolithography techniques: a review. Journal of Nanophotonics, 11(1), 013014.

Ghosh, R., & Ghosh, R. (2017). A review on the progress of nano-lithography towards its future trend. International Journal of Research and Review in Applied Sciences, 32, 1-7.




DOI: https://doi.org/10.37628/ijnn.v8i2.927

Refbacks

  • There are currently no refbacks.